Plasma cleaning equipment is a key process equipment in semiconductor packaging, used for the surface cleaning and activation of products to improve packaging reliability. Wuxi Gaotong has 10 Plasma machines in total, and each machine requires 7 TOOLINGs to be installed. Different TOOLINGs correspond to different products and positions, and some TOOLINGs look alike and are hard to tell apart with the naked eye, making mis-installation very likely. A mis-installed TOOLING results in incorrect product process parameters, causing batch quality incidents. The traditional management approach relied on operators' diligence and lacked a mandatory error-proofing mechanism, so errors could not be intercepted in real time.

The iOT module of the RockPlus MOM manufacturing operations management platform was adopted. An RFID tag is installed on each TOOLING, and the product model and equipment position (positions 1-7) corresponding to each TOOLING are defined in the system. High-temperature-resistant RFID tags are used, able to withstand the 80C high-temperature environment of the Plasma process. RFID read/write antennas are installed at every station of the 10 Plasma machines, and the iOT module automatically reads the TOOLING number and compares it in real time. The RockPlus iBOX smart control box is connected to the equipment's emergency-stop button circuit, automatically triggering an emergency stop when a TOOLING is not in place or its number does not match. A three-color alarm light is added; when an anomaly occurs, the red light flashes and a buzzer sounds. Traceability reports are provided, recording TOOLING usage history, product association information and exception-event statistics.

1. All 10 Plasma machines integrated; TOOLING mis-installation incidents reduced from occasional to zero

2. Forced shutdown ensures errors cannot continue, with alarm response time <1 second

3. Quality traceability time shortened from hours to minutes, improving traceability efficiency by 90%

4. Manual verification eliminated, saving labor cost

5. Reduced material loss and rework cost caused by quality incidents

6. Meets the strict traceability-system requirements of customer factory audits

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  SECS/GEM 工具软件

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