Smart Slot Management
Carrier presence detection, slot indication and on-site information viewing help operators keep track of what is stored where.
RockPlus E-Rack
Semiconductor Smart Electronic Rack
Smart carrier storage that connects AMR automated transfer with semiconductor production equipment. Built for semiconductor manufacturing sites, E-Rack stores, moves and temporarily buffers carriers such as Cassette, Carrier and FOUP. It integrates slot sensors, a barcode reader, slot indicators, a touchscreen and an Optical E84 communication module, supporting carrier presence detection, information identification, on-site status viewing and automated handover with AMR.
Cassette / Carrier / FOUPMulti-carrier storage
3×3 / 4×4 / CustomAdapts to different site layouts
Optical E84Handover handshake with AMR
SECS/GEMConnects to upper-level systems
Product Introduction
From smart storage to automated handover: an efficient carrier turnover node
In semiconductor production, wafer carriers move frequently between equipment, process steps and storage areas. Traditional racks mainly provide storage space and struggle to meet an automated line's need for slot status awareness, carrier identification and equipment handover. RockPlus E-Rack integrates the storage structure, sensors, identification units and communication modules into one unit, combining storage, identification and automated handover capability.
Flexible Buffering and Turnover
Supports multiple carrier types and different slot configurations, and can be deployed around production equipment, beside a Stocker or between process steps to provide buffer space for temporary carrier storage and turnover.
AMR Automated Handover
Performs the carrier handover handshake with the AMR through the Optical E84 communication module, working with the AMR to pick up and place Cassette, FOUP and Carrier automatically.
Working together with production equipment, AMRs and logistics links such as Stockers, E-Rack acts as a carrier buffer and handover node on the line, improving carrier turnover flexibility and supporting automated logistics in semiconductor manufacturing.
Core Features
Core Features
01 Multi-carrier Storage
Stores carriers such as Cassette, Carrier and FOUP, with 3×3, 4×4 and custom slot configurations to suit different site layouts.
02 Slot Status Sensing
Built-in slot sensors detect whether a carrier is present, providing the basic information for slot status viewing and material handover.
03 Barcode Identification and RFID Expansion
A barcode reader comes as standard for reading carrier information; an RFID reader/writer is available as an option for different carrier identification needs.
04 Slot Indication and Touchscreen Interaction
Slot indicators and a touchscreen present the relevant information, giving on-site operators an intuitive way to work with and manage slots.
05 Optical E84 Automated Handover
An Optical E84 communication module establishes the handover handshake with the AMR, supporting status confirmation, transfer permission, execution feedback and exception handling for Load/Unload operations.
06 ESD Protection
Anti-static treated material is used for the slots, combined with grounded equipment structure and power grounding to meet the ESD protection requirements of semiconductor manufacturing sites.
Application Scenarios
E-Rack Scenarios: connecting equipment and AMRs for more flexible carrier turnover
RockPlus E-Rack can be deployed at semiconductor production equipment, Stockers and process turnover areas. Working with the AMR, it provides a temporary storage and handover position for Cassette, FOUP and Carrier during automated transfer.
Scenario 1: Equipment → AMR → E-Rack
Equipment unload and carrier buffering. After the production equipment completes its process, the AMR takes the Cassette from the equipment's load port and moves it to a designated slot on the E-Rack, buffering the carrier after unload.
Suited to cases where the production equipment and the following process run at different cycle rates and an intermediate buffer is needed.
Scenario 2: E-Rack → AMR → Equipment
Carrier retrieval and equipment loading. The AMR takes the Cassette from the E-Rack and delivers it to the target equipment's load port, completing carrier transfer and load handover.
E-Rack acts as a carrier staging area beside the equipment, working with the AMR for automated logistics turnover.
Scenario 3: Stocker + E-Rack
Buffer expansion around a Stocker. In a single-Stocker scenario, an E-Rack can be placed on one side of the Stocker according to the site layout, serving as an additional carrier buffer node.
The AMR turns over the carriers so that the central storage facility and the line's temporary holding areas work together.
Scenario 4: Buffer Between Equipment
Process linkage and turnover buffering. Between different production equipment in the same area, E-Rack temporarily buffers carriers such as Cassettes, and the AMR transfers them according to on-site transfer tasks.
An intermediate buffer node reduces the dependency on direct handover between consecutive process steps.
Business Value
- Bidirectional carrier transfer between equipment and E-Rack
- Meets the temporary buffering needs around a Stocker
- Provides a buffer for carrier turnover between multiple machines in the same area
- Works with the AMR for unmanned carrier pickup, placement and automated handover
AMR Communication
E-Rack and AMR Communication: Optical E84 Carrier Handover
RockPlus E-Rack uses an Optical E84 communication module for signal exchange with the AMR, building a handover control flow around docking confirmation, transfer requests, handover permission, action execution, completion feedback and exception handling. Through status detection and handshaking on both sides, and using the AMR's gripper or lift mechanism, Cassette, FOUP and Carrier are stored and retrieved automatically.
Optical E84 Carrier Handover Flow
STEP 01
System Initialization and Status Confirmation
The AMR approaches the E-Rack and confirms the docking position using photoelectric sensors or position reference points. Both sides establish the E84 handshake and check the handover readiness.
CS_0CS_1CS_2STEP 02
Docking
The AMR sends a Vehicle Dock Request to the E-Rack, and the E-Rack confirms it with Dock Granted. Once physical docking is complete, the AMR sends Dock Complete and the carrier handover preparation begins.
STEP 03
Transfer Request and Permission
The AMR issues a Load/Unload request over the E84 channel. The E-Rack decides whether the transfer may proceed based on slot occupancy, equipment safety conditions and other information, and enters the corresponding handover permission flow.
TR_REQBUSYVALIDTransfer PermitSTEP 04
Transfer Execution
The AMR starts its gripper or lift mechanism to place the FOUP/Carrier into an E-Rack slot, or to take it out of a designated slot. During the transfer, status signals such as BUSY reflect the handover progress and prevent duplicate handover requests.
STEP 05
Completion and Confirmation
When the transfer is complete, both sides confirm the job is finished through project handover statuses such as Transfer Done and COMPLETE. The corresponding busy status is then cleared, Docking is released, the AMR withdraws from the handover position, and the communication flow returns to Idle, ready for the next transfer.
STEP 06
Exception Handling
If docking fails, a transfer is interrupted or the equipment reports an exception, the status is reported through information such as Alarm/Error. The AMR and E-Rack follow the preset fault handling logic to perform Reset, and resume communication once the fault is cleared and the handover conditions are confirmed again.
Key Interaction Signals and Statuses
| Category | Technical Terms |
|---|---|
| Docking | CS_0 / CS_1 / CS_2 |
| Docking business events | Vehicle Dock Request / Dock Granted / Dock Complete |
| Transfer operations | Load / Unload |
| Transfer-related signals | TR_REQ / BUSY / VALID |
| Transfer business statuses | Transfer Permit / Transfer Done / COMPLETE |
| Handover completion | Docking / Idle |
| Exception recovery | Alarm / Error / Reset |
Technical Specifications
Technical Specifications
RockPlus E-Rack-1600
| Equipment model | e-Rack |
|---|---|
| Material types | Cassette / Carrier / FOUP |
| Storage capacity | 3×3 / 4×4 / Custom |
| Communication | SECS/GEM; Optical E84 |
| Operating environment | Temperature 20–25°C, humidity 35–85%, Class 1 |
| Power supply | Fixed power supply |
| Slot ESD protection | Anti-static treated slot material, surface resistance 10⁶–10¹¹ Ω |
| Equipment grounding | External structure grounded, equipment power grounding < 1 Ω |
| Standard functions | E84 communication module, slot sensors, barcode reader, slot indicators, touchscreen |
| Optional functions | RFID reader/writer |
Actual specifications, environmental rating applicability and configuration are subject to the product technical specification.
FAQ
Common questions about AMR transfer, buffer nodes, Optical E84 communication and exception handling on E-Rack.
Does E-Rack support automated transfer with an AMR?
Yes, E-Rack supports automated carrier handover with an AMR. E-Rack performs the handover handshake with the AMR through its Optical E84 communication module, and the AMR's gripper or lift mechanism picks up and places the carriers. A live application requires mechanical docking and communication bring-up between the two sides.
Can E-Rack serve as a buffer node between production equipment?
Yes. E-Rack can be placed around production equipment, beside a Stocker or between process steps to hold carriers such as Cassettes, working with the AMR to move carriers between steps.
What can Optical E84 communication do?
In this product's application, Optical E84 supports the carrier handover handshake and related status exchange, including handover preparation, requests, execution, completion confirmation and exception status handling. The specific signals and sequencing supported are subject to the interface specification agreed by both sides.
What happens if AMR docking fails or a transfer is interrupted?
The system can report Alarm/Error according to the handover interface and the exception logic defined in the project, and re-establish the handover after the fault is cleared and Reset is performed. The actual recovery method depends on how both control systems are implemented.
Seamless connection between smart storage and automated transfer
RockPlus E-Rack combines carrier storage, slot sensing, information identification and Optical E84 automated handover in one unit, providing semiconductor manufacturing sites with flexible material buffering and AMR support. From production equipment to E-Rack, from carrier buffering to automated handover, it builds a more flexible logistics turnover node for semiconductor lines.
